Muto Technology, Inc., Semiconductor Support Specialist

PVD Kitting Programs


OEM Replacement Parts







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PVD Kitting Programs



As the industry searches for cost effective maintenance solutions, Muto Technology continues to deliver product innovations designed to reduce cost and increase productivity in an ever competitive market.

  • Full kit management
  • Extended life kits
  • Hybrid kits
  • Refurbishment of chambers, critical components Spare parts and enhancements


Examples of Kits:


Temescal-Ferrotech Shield Kit

300mm Canon Anelva Shield Kit

200mm IMP® Shield Kit